| Optical System Integration |
LAF-5M
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20mm
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0.1μm (1/20 ϸ·Ö)
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60¡Á60mm
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20mm/s
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5μm
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±0.5μm
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10kgf(98N)
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0.72kg
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0.72°
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15μm ÒÔÄÚ
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LAF-5M